
|
Item |
Technical Property |
|
High purity helium |
|
| Helium He purity (volume fraction)/10-2 ≥ |
99.999 |
| Neon (Ne) content (volume fraction)/10-6 ≤ |
4 |
| Hydrogen (H2) content (volume fraction)/10-6 ≤ |
1 |
| Oxygen (O2) content (volume fraction)/10-6 ≤ |
1 |
| Argon (Ar) content (volume fraction)/10-6 ≤ | |
| Nitrogen (N2) content (volume fraction)/10-6 ≤ |
2 |
| Carbon monoxide (CO) content (volume fraction)/10-6≤ |
0.5 |
| Carbon dioxide (CO2) content (volume fraction)/10-6≤ |
0.5 |
| Methane (CH4) content (volume fraction)/10-6≤ |
0.5 |
| Water H2O content (volume fraction)/10-6≤ |
3 |
| Total magazine content/10-6≤ |
10 |