
| 'ikamu | Waiwai ʻenehana | ||
| oxygen maʻemaʻe | ʻO ka oxygen maʻemaʻe kiʻekiʻe | ʻOkeokeka ultrapure | |
| Oxygen (O2) maʻemaʻe (haʻina leo)/10-2≥ | 99.995 | 99.999 | 99.9999 |
| H2) maʻiʻo (haʻina leo)/10-6≤ | 1 | 0.5 | 0.1 |
| ʻO Argon (Ar) maʻiʻo (ʻāpana leo)/10-6≤ | 10 | 2 | 0.2 |
| Nitrogen (N2) maʻiʻo (haʻina leo)/10-6≤ | 20 | 5 | 0.1 |
| ʻO ke kalapona kalapona (CO2) maʻiʻo (haʻina leo)/10-6≤ | 1 | 0.5 | 0.1 |
| Ka nui o ka maʻiʻo hydrocarbon (haʻiʻōlelo nui) (helu ʻia e ka methane)/10-6≤ | 2 | 0.5 | 0.1 |
| Wai (H2O) maʻiʻo (haʻina leo)/10-6≤ | 3 | 2 | 0.5 |
Ke kahua noi: hoʻohana nui ʻia i ka hoʻomākaukau ʻana i ka hui ʻana o ke kinoea maʻamau, ka noiʻi ʻepekema, ka hana ʻana o nā kaapuni i hoʻohui ʻia a me nā mea semiconductor, a me nā māla ʻē aʻe me nā koi kiʻekiʻe no ka hoʻomaʻemaʻe oxygen.