Products
High purity xenon & Ultra-pure xenon (Xe: 5N, 5.5N, 6N)
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Item |
Technical Property |
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|
High purity xenon GB/T5828-2006 |
Ultrapure xenon |
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| Xenon (Xe) purity (volume fraction)/10-2≥ |
99.999 |
99.9995 |
99.9999 |
| Nitrogen (N2) content (volume fraction)/10-6≤ |
2.5 |
1.5 |
0.2 |
| Oxygen (O2) content (volume fraction)/10-6≤ |
1.5(O2+Ar) |
0.5(O2+Ar) |
0.1 |
| Argon (Ar) content (volume fraction)/10-6≤ |
0.05 |
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| Hydrogen (H2) content (volume fraction)/10-6≤ |
0.5 |
0.5 |
0.05 |
| Carbon monoxide (CO) content (volume fraction)/10-6≤ |
0.2 |
0.1 |
0.05(CO+CO2) |
| Carbon dioxide (CO2) content (volume fraction)/10-6≤ |
0.3 |
0.1 |
|
| Methane (CH4) content (volume fraction)/10-6≤ |
0.3 |
0.1 |
0.05 |
| Water (H2O) content (volume fraction)/10-6≤ |
2 |
1 |
0.1 |
| Krypton (Kr) content (volume fraction)/10-6≤ |
2 |
1 |
0.1 |
| Nitrous oxide (N2O) content (volume fraction)/10-6≤ |
0.2 |
0.1 |
0.05 |
| Fluoride (C2F6) content (volume fraction)/10-6≤ |
0.5 |
0.1 |
0.05 |
| Fluoride (SF6) content (volume fraction)/10-6≤ |
N/A |
N/A |
0.05 |
Application fields: mainly used in semiconductor industry, aerospace, electric light source industry, medical treatment, electric vacuum, dark matter research, laser and other fields
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