Ngwaahịa
Carbon tetrafluoride
Tetrafluoromethane, nke a makwaara dị ka carbon tetrafluoride, bụ fluorocarbon kacha mfe (CF4). Ọ nwere ike njikọ dị oke elu n'ihi ọdịdị nke njikọ carbon-fluorine. Enwere ike kewaa ya dị ka haloalkane ma ọ bụ halomethane. N'ihi ọtụtụ carbon-fluorine bonds, na electronegativity kasị elu nke fluorine, carbon dị na tetrafluoromethane nwere nnukwu ụgwọ akụkụ dị mma nke na-ewusi ma na-ebelata njikọ anọ nke carbon-fluorine site n'inyekwu agwa ionic. Tetrafluoromethane bụ ikuku griin haus siri ike.
A na-eji tetrafluoromethane eme ihe mgbe ụfọdụ dị ka friji dị ala. A na-eji ya na microfabrication nke eletrọnịkị naanị ma ọ bụ jikọtara ya na oxygen dị ka ihe na-emepụta plasma maka silicon, silicon dioxide, na silicon nitride.
| Usoro ọgwụ | CF4 | Ibu arọ molekụla | 88 |
| CAS Mba. | 75-73-0 | EINECS Mba. | 200-896-5 |
| Ebe mgbaze | -184 ℃ | Ebe na-agwụ ike | -128.1 ℃ |
| solubility | Na-adịghị edozi na mmiri | Njupụta | 1.96g/cm³ (-184 ℃) |
| Ọdịdị | Ihe na-enweghị agba, enweghị isi, enweghị ọkụ, gas na-agbakọ | Ngwa | eji na plasma etching usoro maka dị iche iche integrated sekit, na-ejikwa dị ka laser gas, refrigerant wdg. |
| Nọmba NJ DOT | UN1982 | Aha Mbupu DOT/IMO: | Tetrafluoromethane, Mpịakọta ma ọ bụ Refrigerant Gas R14 |
| Klas ihe egwu DOT | Klas 2.2 |
| Ihe | Uru, ọkwa I | Uru, ọkwa II | Nkeji |
| Ịdị ọcha | ≥99.999 | ≥99.9997 | % |
| O2 | ≤1.0 | ≤0.5 | ppmv |
| N2 | ≤4.0 | ≤1.0 | ppmv |
| CO | ≤0.1 | ≤0.1 | ppmv |
| CO2 | ≤1.0 | ≤0.5 | ppmv |
| SF6 | ≤0.8 | ≤0.2 | ppmv |
| Fluorocarbons ndị ọzọ | ≤1.0 | ≤0.5 | ppmv |
| H2O | ≤1.0 | ≤0.5 | ppmv |
| H2 | ≤1.0 | —— | ppmv |
| Acidity | ≤0.1 | ≤0.1 | ppmv |
| * fluorocarbon ndị ọzọ na-ezo aka na C2F6,C3F8 | |||
Ihe ndetu
1) data teknụzụ niile egosiri n'elu bụ maka ntụaka gị.
2) A na-anabata nkọwapụta ọzọ maka mkparịta ụka ọzọ.
