
| Item | Properti Teknis | ||
| Nitrogen murni | Nitrogen kemurnian dhuwur | Nitrogen ultrapure | |
| Nitrogen (N2) kemurnian (fraksi volume)/10-2≥ | 99.99 | 99.999 | 99.9999 |
| Oksigen (O2) isi (fraksi volume)/10-6≤ | 50 | 3 | 0.1 |
| Kandungan Argon (Ar) (fraksi volume)/10-6≤ | - | - | 2 |
| Hidrogen (H2) isi (fraksi volume)/10-6≤ | 15 | 1 | 0.1 |
| Kandungan karbon monoksida (CO) (fraksi volume)/10-6≤ | 5 | 1 | 0.1 |
| Karbon dioksida (CO2) isi (fraksi volume)/10-6≤ | 10 | 1 | 0.1 |
| Metana (CH4) isi (fraksi volume)/10-6≤ | 5 | 1 | 0.1 |
| Banyu (H2O) isi (fraksi volume)/10-6≤ | 15 | 3 | 0.5 |