
| Res | Proprietas Technica | ||
| Xenonum altae puritatis GB/T5828-2006 | Xenon purissimum | ||
| Puritas Xenonis (Xe) (fractio voluminis)/10-2≥ | 99.999 | 99.9995 | 99.9999 |
| Nitrogenium (N2) contentum (fractio voluminis)/10-6≤ | 2.5 | 1.5 | 0.2 |
| Oxygenium (O2) contentum (fractio voluminis)/10-6≤ | 1.5(O2+Ar) | 0.5(O2+Ar) | 0.1 |
| Argon (Ar) contentum (fractio voluminis)/10-6≤ | 0.05 | ||
| Hydrogenium (H2) contentum (fractio voluminis)/10-6≤ | 0.5 | 0.5 | 0.05 |
| Monoxidi carbonii (CO) contentum (fractio voluminis)/10-6≤ | 0.2 | 0.1 | 0.05(CO+CO2) |
| Contentum dioxidi carbonis (CO2) (fractio voluminis)/10-6≤ | 0.3 | 0.1 | |
| Methanum (CH4) contentum (fractio voluminis)/10-6≤ | 0.3 | 0.1 | 0.05 |
| Aqua (H2O) contentum (fractio voluminis)/10-6≤ | 2 | 1 | 0.1 |
| Contentum Kryptoni (Kr) (fractio voluminis)/10-6≤ | 2 | 1 | 0.1 |
| Oxidum nitrosum (N2O) contentum (fractio voluminis)/10-6≤ | 0.2 | 0.1 | 0.05 |
| Fluoridum (C2F6) contentum (fractio voluminis)/10-6≤ | 0.5 | 0.1 | 0.05 |
| Fluoridum (SF6) contentum (fractio voluminis)/10-6≤ | N/A | N/A | 0.05 |
Campi applicationis: praecipue adhibitum in industria semiconductorum, industria aerospatiali, industria fontium lucis electricae, curatione medica, vacuo electrico, investigatione materiae obscurae, lasere et aliis campis.