
|
Item |
Technical Property |
|
High purity neon |
|
| Neon (Ne) purity (volume fraction)/10-2≥ |
99.999 |
| Helium (He) content (volume fraction)/10-6≤ |
6 |
| Hydrogen (H2) content (volume fraction)/10-6≤ |
1 |
| Oxygen+argon (calculated by oxygen) (O2+Ar) content (volume fraction)/10-6≤ |
1 |
| Nitrogen (N2) content (volume fraction) zz/10-6≤ |
2 |
| Carbon monoxide (CO) content (volume fraction)/10-6≤ |
0.2 |
| Carbon dioxide (CO2) content (volume fraction)/10-6≤ |
0.2 |
| Methane (CH4) content (volume fraction)/10-6≤ |
0.1 |
| Water (H2O) content (volume fraction)/10-6≤ |
2 |
| Total impurity content (volume fraction)/10-6≤ |
10 |