
| Into | Ipropati yoBugcisa | ||
| Ioksijini ecocekileyo | Ioksijini ecocekileyo ephezulu | Ioksijini ecocekileyo | |
| Ioksijini (O2) ubunyulu (iqhezu lomthamo)/10-2≥ | 99.995 | 99.999 | 99.9999 |
| IHydrojeni (H2) umxholo (iqhezu lomthamo)/10-6≤ | 1 | 0.5 | 0.1 |
| Umxholo weArgon (Ar) (iqhezu lomthamo)/10-6≤ | 10 | 2 | 0.2 |
| Nitrogen (N2) umxholo (iqhezu lomthamo)/10-6≤ | 20 | 5 | 0.1 |
| Ikhabhon diokside (CO2) umxholo (iqhezu lomthamo)/10-6≤ | 1 | 0.5 | 0.1 |
| Isiqulatho esipheleleyo se-hydrocarbon (iqhezu lomthamo) (libalwe nge-methane)/10-6≤ | 2 | 0.5 | 0.1 |
| Amanzi (H2O) umxholo (iqhezu lomthamo)/10-6≤ | 3 | 2 | 0.5 |
Intsimi yesicelo: isetyenziswa kakhulu ekulungiseleleni umxube wegesi oqhelekileyo, uphando lwezenzululwazi, ukuveliswa kweesekethe ezidibeneyo kunye nezixhobo ze-semiconductor, kunye nezinye iindawo ezineemfuno eziphezulu zokucoceka kwe-oxygen.